 iCon Dynamics ChemSource™ Delivery
Systems are high-purity chemical delivery systems
designed especially
for use with our patented Self-Metering Reservoir (SMR) vapor delivery systems.
The ChemSource™ 2100
system houses two 210 Liter
vessels, and operates by using “push gas” to pressurize the source vessel
and push chemical to the POU. Each
vessel sits on a scale that measures its weight.
The fully automated system provides
continuous, online availability of chemical to support multiple points
of use. The controller provides automated vessel change-out
routines, as well as many other procedures for maintenance and
diagnostics of the system
The Touch Screen
Display (Figure 3
) is the primary communication interface between the operator and
the ChemSource™ Delivery System.
It enables the operator to view status of each vessel and process
panel, to perform various procedures, and to set the system’s
operating parameters.
Pneumatic
Pressure Gauge
This switch-gauge on
the front panel shows the supply pressure of the gas that activates the
pneumatic valves of the ChemSource™ Delivery System.
An LED on the gauge lights (red) if the pneumatic supply pressure
drops below the gauge’s setpoint.
To adjust the setpoint, turn the cover-glass counter-clockwise to
remove it, move the setpoint, and reinstall the cover-glass.
The horn for the
audible alarm is positioned
between the Pneumatic Pressure Gauge and the EMO switch.
The
purpose of this switch is to quickly stop chemical flow through the
system. It is turned
clockwise to activate the ChemSource™ Delivery System, and pushed in
to close all valves; power is not removed from the PLC or touchscreen,
so system status can be assessed while the system is shutdown with this
switch.
On the front of the
plumbing enclosure just below the control enclosure is a pressure gauge
that measures pressure in the exhaust stack in Inches of Water Column.
Each vessel has its
own access door and process panel. Each door has a window in it.
A lamp on the process panel, which is visible through the window,
is used during Vessel Changeout procedures.
Whenever the door to a vessel is to be opened, the appropriate
lamp lights (green) to help the operator ensure that the correct door is
opened. If a wrong door is
opened, an alarm will sound and the ChemSource™ Delivery System will
shut down.
During
Vessel Changeout, an active purge is maintained through the pigtails
while they are removed from one vessel and attached to the replacement
vessel. While purge gas
flows from the pigtails, the Open-door Lamp blinks.
A dual setpoint
indicating pressure switch gauge on the vessel A process panel displays
and monitors pressure during purge and evacuation operations.
Purge Gas Inlet
Pressure Gauge measures the pressure of the Purge Gas as it enters the
ChemSource™ Delivery System.
The
Push Gas Inlet Pressure Gauge measures the pressure of the push gas as
it enters the ChemSource™ Delivery System.
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