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iCon Dynamics ChemSourceTM Delivery Systems are
high-purity chemical delivery systems designed especially for use with
our patented Self-Metering Reservoir (SMR) systems.
iCon
Offers the Following UHP Liquid Refill Systems:
ChemSourceTM 150
- Single Vessel
- Up to 38 Liters
ChemSourceTM 250
- Two Vessels
- Up to 38 Liters
ChemSourceTM 350
- Three Vessels
- Up to 38 Liters
ChemSourceTM 1100
- Single Vessel
- Up to 210 Liters
ChemSourceTM 2100
- Two Vessels
- Up to 210 Liters
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ChemSourceTM
150 houses one (1) vessel (up to 38 liters), and can be configured for dedicated source
delivery or auto-switchover operation.
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ChemSourceTM
250 houses two vessels (up to 38 liters each), and can be configured for dedicated source
delivery or auto-switchover operation.
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ChemSourceTM
350 houses three
(3) vessels (up to 38 liters each), and can be configured for three
dedicated sources, or auto-switchover vessels from two vessels, and
dedicated delivery from the third vessel.
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ChemSourceTM
1100 houses one (1) 210 liter vessel for standalone operation.
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ChemSourceTM
2100 can be configured
for two (2) 210 liter vessels for dedicated source delivery or auto-switchover operation.
The purpose and benefit of the auto-switch configuration is to
provide continuous, uninterrupted supply of chemical to a Point-of-Use (POU)
or multiple POUs. The ChemSourceTM
features the capacity to support several POUs.
Each vessel is positioned on a scale, which measures its net
weight during operation. A
minimum weight can be programmed into the controller, to signal an
automatic switchover to a standby vessel.
Once the switchover has occurred, an operator can perform a
vessel change-out procedure to replace the empty vessel with a full one. The auto-switch system is
controlled from a single controller, which will be mounted to the
cabinet.
ChemSourceTM
operates by
using “push gas” to pressurize the source vessel and push chemical
to the POU when requested by the POU.
Each vessel sits on a scale that measures the vessel’s net
weight, and that weight is displayed on the Main Screen of the
system’s control panel.
On “A” models, a minimum
weight is programmed into the controller to signal when to automatically
switchover to the standby vessel. When
the switchover has occurred, an operator can perform a menu-driven
vessel change-out procedure to replace the empty vessel with a full one,
without interrupting flow from the active vessel.
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Touch screen operator
interface
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Two levels of password
protection for maintenance functions
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Automatic vessel
change-out procedure with user prompts
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Control and plumbing
enclosures that are attached, but partitioned for safety
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Automatic
purge-evac
capability
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Manual, high-pressure, inlet
and outlet valves
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Hardware safety interlocks
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Mini in-line filter on purge
gas supply
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Drain from point of use
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Purge and evacuate to point
of use
ChemSourceTM
utilizes two
5-valve automated delivery panels, and is designed for continuous
pressurized supply of the source chemical to the point of use.
The push gas, purge gas, vent and evacuation plumbing circuits
are common to both delivery panels.
The system provides fully automated functions for on-line and
off-line operations to assure uninterrupted supply of chemical.
The system also features automated routines for vessel change-out
to ensure that the panel has been fully purged and evacuated prior to
vessel change-out.
The
system utilizes load cells to measure the weight of the supply vessels
and their contents.
Alarm functions are provided to signal low level warnings and
alarms.
When a low liquid level is reached, the system will automatically
switch over to the stand-by vessel for continued operation.
If the stand-by vessel is also empty, the system will signal an
alarm, and go into offline status.
The system also provides high liquid level alarms, but these are
used when chemical in the distribution lines are flush back into the It
is highly recommended that an empty vessel be used at the start of a
reclaim procedure.
Touch Screen Display and Interface
The
ChemSourceTM
touch screen Graphical User Interface (GUI) provides
user-friendly interface to put set up, operate and maintain the system.
The main screen displays full system
status, including chemical availability for each vessel, supply
pressure, and indication of operating state.
From the main status screen the operator can easily navigate to
other screens to view:
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A side
and/or B side status
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System-level and
panel-level alarms and setpoints
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Level 1 maintenance for vessel
change-out
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Level 2 maintenance for advanced set-up and
maintenance functions.
A-Side/B-Side Status
Display
Once the operator selects
A-Side or B-Side Schematic view, a graphical schematic of the vessel and
delivery panel are displayed. The
schematic will indicate the active state of the valves, as well as the
vessel weight and delivery pressure.
The graphic image of the vessel will illustrate the amount of
chemical remaining. The
operator can refer to this screen to monitor status during operations
such as online supply, offline, vessel stand-by, vessel change-out, or
advanced maintenance procedures.
Maintenance
Screens
Level
1 Maintenance
The
Maintenance Screen provides two levels of password-protected control
interface to ChemSourceTM. Level
1 enables the operator to perform vessel change-out routines. From the Maintenance 1 screen, ChemSourceTM
provides step-by-step
instructions to perform safe and proper vessel change-out.
For example, once the operator initiated the change-out
procedure, the controller automatically flushes liquid from the delivery
panel back into the source vessel.
The display then instructs the operator to open the cabinet door
and close manual valves located on the vessel, close the cabinet door,
then press the "Acknowledge" button on the display to continue
to the next step of the vessel change-out procedure.
This multi-step, interactive procedure assures operator safety
and prevention of corrosion or contamination in the delivery panel.
The Level
display also provides general purge and evacuation maintenance
functions, but limited to the conditioning of the delivery panel.
Level
2 Maintenance
Level 2 maintenance
requires higher-level authorization.
This is where the ChemSourceTM system is configured for operation,
and where advanced maintenance procedures can be performed.
In the set-up menu the authorized operator can enter setpoints
for normal operation and alarms. The operator can select single- vessel or auto-switch
operating modes, and "enable"
local versus POU control of the main ChemSourceTM supply valve.
The default controller set-up provides for a POU control signal
to open the ChemSourceTM supply valve. This valve's position is displayed
on the ChemSourceTM Main Screen.
A key
feature of Level 2 maintenance is "Chemical Reclaim," which
enables the operator to configure the delivery panel to receive/reclaim
chemical from the point of use. In
order to do this, the point of use must be capable of
"pushing" the chemical back into the source reclaim vessel.
Like a vessel change-out, the reclaim function is a multi-step
process that requires coordinated activity between the ChemSourceTM
and
the point of use. iCon's
SMR vapor delivery system and "L"
VMB can be configured to "push" the chemical back to the ChemSourceTM.
ChemSource
Plumbing
ChemSourceTM
features fully automated
5-valve panels. The system also includes one (1) automated facilities panel
which includes push gas supply with pressure relief valve, purge gas
supply, vacuum generator circuit, and pressure transducer for
monitoring pump/pourge routines. The
panel also includes a purge gas flow switch, which is used to ensure
positive purge gas flow during vessel changes. The
following functions are available with this plumbing system:
Normal
Operation
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Online, delivery to POU
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Standby, ready for delivery to POU
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Offline, Alarm condition or under local control/maintenance
Normal
Maintenance
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Vessel Change-out, Drain/Purge/Evacuation operation used during
vessel change-out
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Purge/Evacuation of delivery panel
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Continuous purge of delivery panel to vent
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Continuous evacuation of delivery panel to vent
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Operator-driven vessel switch-over
Advanced
Maintenance
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