iCon Dynamics ChemSource™ Delivery Systems are high-purity chemical delivery systems designed especially for use in CVD applications.

The ChemSource 150 is a fully automated, single vessel, pressure dispense system.  Capable of housing vessels up to 38 liters, the ChemSource 150 can deliver CVD chemicals to up to 3 separate points of use.

System Features:

• Fully automated, available with network communications

• Color touch screen GUI

• Rugged welded steel cabinet construction

• Adjustable height shelf

• Analog scale measures vessel weight

• All UHP 316L 1/4" stainless steel plumbing

• On-board facilities gas panel

• Zero dead leg 5-valve process panel

• Up to three valved outlets

• All facilities connections located on top of cabinet

Safety Features:

• 110% spill containment

• Local and remote EGO

• Audible alarm

• Color-coded display of Warnings and Alarms

• Door interlock alarm

• Low and high liquid level alarms

• Low and high pressure alarms

• Over-pressure safety relief

• Optional sprinkler head

• Optional gas detection

• Bolt-down mounting of cabinet

Standard Functions:

• Online - Actively delivering chemical

• Ready - Waiting for "call for chemical"

• Offline - Not available for "call for chemical"

• Automated vessel change-out procedure with user prompts

• Pump/Purge to Point of Use

System Specifications:

• Cabinet Dimensions - 23.1" W x 20" W x 69.5" H

• Plumbing - 316L S/S, 1/4" welded with VCR connections for HP or UHP service

• Vessel sizes - 4 to 38 liters - supplied by customer

2 GPM Max

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